Stepper Equipment Guide
| OEM | Equipment | Lamp # | Lifetime (Hours) | |||
| ASML | PAS2500/10, /30,/40 | ASLHSH350W | 600 | |||
| ASML | PAS5000/50, /60, /80-500W | ASLHSH500W | 800 | |||
| ASML | PAS5000/45, /55 | ASLHSH500WB | 800 | |||
| ASML | 5500/60B/80B/100/100B | ASLHSH1003PI | 1500 | |||
| ASML | 2500/22, 5500/100C, 100D | ASLHSH1500PI | 1500 | |||
| ASML | 5500/100C, /100D | ASLHSH1500PIE | 2250 | |||
| ASML | 5500/200 | ASLHSH2500PIL | 1500 | |||
| ASML | NSR4425i | ASLHSH2501NIL | 1500 | |||
| ASML | 5500/200B, /250C | ASLHSH3500PI | 1500 | |||
| ASML | 5500/400 | ASLHSH3501PI | 850 | |||
| Canon | FPA112FA, 141 | ASLHSH500W | 800 | |||
| Canon | FPA1500 | ASLHSH500WB | 800 | |||
| Canon | FPA1550 Mark I, II | ASLHSH1000CE | 2500 | |||
| Canon | FPA1550 Mark III, IV | ASLHSH1002CE | 2500 | |||
| Canon | FPA2000i1, 2500i2, i3 | ASLHSH1500CIE | 2250 | |||
| Canon | FPA3000i4, i5, i5+, iw | ASLHSH2001CIE | 2250 | |||
| Canon | MPA500, 501, 600FA(b)/SU | ASLHSH2002MA | 1000 | |||
| Canon | MPA1500 (LCD) | ASLHSH2002MA | 1000 | |||
| GCA/ISI | DSW4800-5000 | ASLHSH350W | 600 | |||
| GCA/ISI | 8000 G-Line | ASLHSH1000GE | 2500 | |||
| GCA/ISI | 8000 I-Line | ASLHSH1000GI | 800 | |||
| GCA/ISI | 8000 I-Line | ASLHSH1000GIL | 1500 | |||
| GCA/ISI | ALS (8500) | ASLHSH1002GE | 2500 | |||
| GCA/ISI | XLS, ISIS | ASLHSH1003GI | 800 | |||
| GCA/ISI | XLS, ISIS | ASLHSH1003GIL | 1500 | |||
| Karl Suss | MA4, 6, 8, 150, MJB3, 21 | ASLHSH350S | 600 | |||
| Karl Suss | UV300/500 | ASLHSH350S | 600 | |||
| Karl Suss | MA 6, 8, 25, 150, 200 | ASLHSH1000KS | 1500 | |||
| Karl Suss | MA 100RR, 150, 200 | ASLHSH1500KS | 1000 | |||
| Nikon | Mark I, Mark II | ASLHSH1000NEL | 2500 | |||
| Nikon | Mark III, Mark IV | ASLHSH1002NL | 1500 | |||
| Nikon | Mark III, Mark IV | ASLHSH1002NIEL | 2500 | |||
| Nikon | NSR1010 i3 | ASLHSH500WB | 800 | |||
| Nikon | NSR1505G, G3 | ASLHSH500WB | 800 | |||
| Nikon | NSR 1505 G3, G4 | ASLHSH1000NE | 2500 | |||
| Nikon | NSR 1505 G5, G6, G7, G8 | ASLHSH1002NE | 2500 | |||
| Nikon | NSR1505 i6, i7 | ASLHSH1002NIL | 1500 | |||
| Nikon | NSR2005 i8 | ASLHSH2000NIL | 1500 | |||
| Nikon | NSR2005 i8 | ASLHSH2000NIE | 2250 | |||
| Nikon | NSR2005 i9, i10, 2205 i11 | ASLHSH2001NIEL | 1500 | |||
| Nikon | NSR2005 i9, i10, 2205 i11 | ASLHSH2001NIE | 2250 | |||
| Nikon | NSR2205 i11 w/SHRINC 3 | ASLHSH2002NIL | 1500 | |||
| Nikon | NSR2205 i11 w/SHRINC 3 | ASLHSH2002NIE | 2250 | |||
| Nikon | NSR2205 i12 | ASLHSH2011NIL | 1500 | |||
| Nikon | NSR2205 i12 | ASLHSH2011NIE | 2250 | |||
| Nikon | NSR4425I | ASLHSH2501NIL | 1500 | |||
| Nikon | NSR2205 i14E | ASLHSH2510NIL | 1500 | |||
| SVGL | Microscan II, II+, QML | ASLHSH4000P | 1500 | |||
| SVGL | Microscan II | ASLHSH2400P | 1500 | |||
| Ultratech | 2700 | ASLHSH1000UEO | 2500 | |||
| Ultratech | 4700, 2244i | ASLHSH1002UEO | 2500 g-line | |||
| 1500 i-line | ||||||
